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Pyrophoric, colorless gas; ignites spontaneously in air and is used in semiconductor technology.
✓ measurable with the air-Q Science on request.
Technical production; CVD processes, thin-film solar cells.
Occupational exposure limits exist; primary hazard is spontaneous ignition/explosion.
Risk of burns/explosion; inhalation of decomposition products irritates the respiratory tract.
Inert gas purging, exhaust gas combustion/scrubbing, leak detection.
Technical production; CVD processes, thin-film solar cells.
Occupational exposure limits exist; primary hazard is spontaneous ignition/explosion.
Risk of burns/explosion; inhalation of decomposition products irritates the respiratory tract.
Inert gas purging, exhaust gas combustion/scrubbing, leak detection.
